期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 147, 期 2, 页码 430-435出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2008.05.020
关键词
force sensor; diffused silicon piezoresistors
In this contribution we report on a miniaturized bulk micro-machined three-axes piezoresistive force sensor. The force sensor consists of a full membrane with 16 conventional two terminal p-type diffused piezoresistors on the surface of the membrane. The die size of the chip is 6.5 mm x 6.5 mm. Piezoresistors with four different designs were placed on the membrane. Sensitivities were found to be in the range of 0.37-0.79 mV/(V mN) and 1.68-2.92 mV/(V mN) in Z-direction and X- or Y-direction, respectively. The stiffness of the measured microprobes in the range of 5-8 mN/mu m and 0.27-0.48 mN/mu m were obtained in vertical and lateral direction, respectively. Various single and twin membranes designs were simulated to calculate stiffness of the microprobe. The measurement results show a cross-axis sensitivity of <2.5% at full scale of 25 mN. (C) 2008 Elsevier B.V. All rights reserved.
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