Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications

This paper covers research on novel thin films with periodical microstructureoptical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectricplasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems. Novel optical elements can be tunable under defined bias and change its main grating parameters (depth and width) influencing the response of diffraction efficiencies. These elements allow opening new avenues in the design of more sensitive and multifunctional microdevices.