期刊
SENSORS
卷 14, 期 7, 页码 12735-12747出版社
MDPI
DOI: 10.3390/s140712735
关键词
acetone microsensor; alpha-Fe2O3; ring oscillator circuit
资金
- National Science Council of the Republic of China [NSC 101-2221-E-005-007-MY3]
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 mu m complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is alpha-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the alpha-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm.
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