期刊
SENSORS
卷 13, 期 2, 页码 2206-2219出版社
MDPI
DOI: 10.3390/s130202206
关键词
nanometrology; laser noise; interferometry; nanopositioning; AFM
资金
- Grant Agency of CR [GPP102/11/P820, GA102/09/1276]
- Academy of Sciences of CR [KAN311610701]
- Ministry of Education, Youth and Sports of CR [CZ.1.05/2.1.00/01.0017, LC06007]
- European Social Fund [CZ.1.07/2.4.00/31.0016]
- National Budget of the Czech Republic [CZ.1.07/2.4.00/31.0016]
- Technology Agency of CR [TA02010711]
In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
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