期刊
SENSORS
卷 13, 期 1, 页码 865-874出版社
MDPI
DOI: 10.3390/s130100865
关键词
temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography
资金
- National Science Council, Taipei, Taiwan [NSC 101-2627-E-002-005-, NSC 101-2220-E-002-002-]
- National Taiwan University [101R7624-2]
In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 degrees C. At the optimized temperature of 300 C, the proposed sensor repeatedly obtained a rise/recovery time (Delta R: 0.9 R-0 to 0.1 R-0) of 3.2/17.5 s and a corresponding sensor response (Delta R/R-0) of 21.7% at an ethanol injection mass quantity of 0.2 mu g.
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