期刊
SENSORS
卷 12, 期 3, 页码 2598-2609出版社
MDPI
DOI: 10.3390/s120302598
关键词
thin film; AFM; XPS; CeO2; SnO2; CO sensor; semiconductor gas sensor
资金
- Physics Department of King Fahd University of Petroleum and Minerals
Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 degrees C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6-21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 degrees C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.
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