期刊
SENSORS
卷 11, 期 4, 页码 3706-3716出版社
MDPI AG
DOI: 10.3390/s110403706
关键词
MEMS; flexible micro temperature sensor; micro reformer
资金
- Bureau of Energy, Ministry of Economy Affair of R.O.C. [99-D0204-4]
- Ministry of Education of the R.O.C.
- YZU Fuel Cell Center [217019]
- National Science Council of R.O.C. [NSC 98-2627-M-155-003]
Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance.
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