期刊
SENSORS
卷 11, 期 12, 页码 11206-11234出版社
MDPI
DOI: 10.3390/s111211206
关键词
MEMS accelerometer; electrostatic suspension; six-axis; hybrid microfabrication; UV-LIGA; SU-8; levitation
资金
- Beijing Research Institute of Aerospace Control and Instrument
- Aerospace Support Foundation [11GFZ-JJ02-005]
- Shanghai Municipal Natural Science Foundation [10ZR1415500]
- National Natural Science Foundation of China [51075278]
- Ministry of Education of China [NCET10-0583]
- National Key Lab Foundation of Nano/Micro Fabrication Technology [9140C790405110C7904]
A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 mu m using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 mu m, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated.
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