相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Micromachined Piezoresistive Accelerometers Based on an Asymmetrically Gapped Cantilever
Yuefa Li et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2011)
Miniaturization limits of piezoresistive MEMS accelerometers
Manuel Engesser et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2009)
Review: Semiconductor Piezoresistance for Microsystems
A. Alvin Barlian et al.
PROCEEDINGS OF THE IEEE (2009)
Technologies for cofabricating MEMS and electronics
Gary K. Fedder et al.
PROCEEDINGS OF THE IEEE (2008)
Process development for CMOS-MEMS sensors with robust electrically isolated bulk silicon microstructures
Hongwei Qu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2007)
CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity
S Kal et al.
MICROELECTRONICS JOURNAL (2006)
Piezoresistive accelerometers for MCM package
JA Plaza et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
Polysilicon: a versatile material for microsystems
PJ French
SENSORS AND ACTUATORS A-PHYSICAL (2002)
Post-CMOS processing for high-aspect-ratio integrated silicon microstructures
H Xie et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)