期刊
SENSORS
卷 10, 期 6, 页码 6149-6171出版社
MDPI
DOI: 10.3390/s100606149
关键词
electrostatics; electromechanics; MEMS; pull-in voltage
资金
- National Science Council of Taiwan [97-2221-E-002-151-MY3, NSC-98-3111-Y-076-011]
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
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