期刊
SENSORS
卷 10, 期 5, 页码 4180-4193出版社
MDPI
DOI: 10.3390/s100504180
关键词
FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据