期刊
SENSORS
卷 9, 期 4, 页码 2895-2906出版社
MDPI
DOI: 10.3390/s90402895
关键词
benzene, gas sensor; MEMS; micro-heater; WO3 thin film
资金
- National Science Council in Taiwan [NSC 97-3114-E-110-001, NSC 97-2221-E-020-038, NSC 97-2218-E-006-012]
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This causes a change in the electrical conductivity of the WO3 film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parameters. It is found that the sensitivity of the gas sensor is optimized at a working temperature of 300 degrees C. At the optimal working temperature, the experimental results show that the sensor has a high degree of sensitivity (1.0 K Omega ppm(-1)), a low detection limit (0.2 ppm) and a rapid response time (35 s).
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