期刊
SENSORS
卷 9, 期 3, 页码 1423-1432出版社
MDPI
DOI: 10.3390/s90301423
关键词
Si-MHA; MEMS; micro fuel cell; GDL; RTD sensor
资金
- Ministry of Education of R. O. C.
- YZU Fuel Cell Center [0950026846]
- National Science Council of R. O. C. [NSC 96-2221-E-155-030]
Silicon micro-hole arrays (Si-MHA) were fabricated as a gas diffusion layer (GDL) in a micro fuel cell using the micro-electro-mechanical-systems (MEMS) fabrication technique. The resistance temperature detector (RTD) sensor was integrated with the GDL on a bipolar plate to measure the temperature inside the fuel cell. Experimental results demonstrate that temperature was generally linearly related to resistance and that accuracy and sensitivity were within 0.5 degrees C and 1.68x10(-3)/degrees C, respectively. The best experimental performance was 9.37 mW/cm(2) at an H-2/O-2 dry gas flow rate of 30/30 SCCM. Fuel cell temperature during operation was 27 degrees C, as measured using thermocouples in contact with the backside of the electrode. Fuel cell operating temperature measured in situ was 30.5 degrees C.
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