Numerical simulation of impact-induced rupture in polysilicon MEMS

The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh. The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level, global-local, multi scale approach.