期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 28, 期 7, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/28/7/074009
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资金
- Defense Advanced Research Projects Agency Microsystems Technology Office (DARPA-MTO) Nitride Electronic NeXt-Generation Technology (NEXT) program
- Office of Naval Research (ONR) Millimeter-wave Initiative for Nitride Electronics (MINE) program
- Materials Research Science and Engineering Center (MRSEC) of the National Science Foundation (NSF)
- Intel Corp.
- UCSB Nanofabrication Facility, part of the NSF
This paper reviews the progress of N-polar (000 (1) over bar) GaN high frequency electronics that aims at addressing the device scaling challenges faced by GaN high electron mobility transistors (HEMTs) for radio-frequency and mixed-signal applications. Device quality (Al, In, Ga)N materials for N-polar heterostructures are developed using molecular beam epitaxy and metalorganic chemical vapor deposition. The principles of polarization engineering for designing N-polar HEMT structures will be outlined. The performance, scaling behavior and challenges of microwave power devices as well as highly-scaled depletion- and enhancement-mode devices employing advanced technologies including self-aligned processes, n+ (In, Ga)N ohmic contact regrowth and high aspect ratio T-gates will be discussed. Recent research results on integrating N-polar GaN with Si for prospective novel applications will also be summarized.
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