期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 26, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/26/8/085008
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资金
- National Key Basic Research Program of China [TG-2007CB307004, 2011CB301905]
- National Natural Science Foundation of China [61006035, 61076012, 60676032, 60607003]
- National High-Tech Research and Development Program of China [2009AA03A198]
- Postdoctoral Science Foundation of China [20090460168]
Vertical structure LEDs have been fabricated with a novel light extraction composite surface structure composed of a micron grating and nano-structure. The composite surface structure was generated by using a modified YAG laser lift-off technique, separating the wafers from cone-shaped patterned sapphire substrates. LEDs thus fabricated showed the light output power increase about 1.7-2.5 times when compared with conventional vertical structure LEDs grown on plane sapphire substrates. A three-dimensional finite difference time domain method was used to simulate this new kind of LED device. It was determined that nano-structures in composite surface patterns play a key role in the improvement of light extraction efficiency of LEDs.
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