Application of sputtered ruthenium nitride thin films as electrode material for energy-storage devices

RuN films that crystallized in the ZnS-like structure with [111] preferred orientation have been deposited by reactive sputtering. Preliminary results are reported on the electrochemical properties of such films as electrode materials for supercapacitors and lithium-ion batteries. Cyclic voltammetric experiments indicate an attractive capacitance value of 37 F g(-1). Moreover, galvanostatic measurements indicate that RuN films reversibly react with lithium through a conversion reaction with Ru(0) nanoparticle formation. A high capacity value of similar to 700 mAh g(-1) at C/2 rate is achievable. (C) 2013 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.