Development of Ni-based superalloys for microelectromechanical systems

Electrodeposited LIGA Ni microtensile specimens, representative of microelectromechanical systems components, have been vapor-phase aluminized with a process traditionally used to make diffusion aluminide coatings. Subsequent heat treatments resulted in homogenization of Al throughout the specimens and production of a precipitation-strengthened (gamma-Ni + gamma'-Ni3Al) microstructure. The thermal stability and strength of these components represent a significant improvement over traditional LIGA Ni materials. Microprobe analysis points to the importance of composition in determining strength and ductility of these materials. (C) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.