Three-dimensional atom probe investigations of Ti-Al-N thin films

Elemental processes underlying the temperature-initiated decomposition of low-conductive Ti-Al-N thin films is investigated on an atomic-scale by laser-assisted three-dimensional atom probe tomography. This allows three-dimensional observation of spinodal decomposition in Ti-Al-N. Experimental evidence is presented for the formation of an interconnected network of Ti- and Al-rich domains and the subsequent phase transformation under increased thermal load to a dual phase structure of TiN and AlN areas. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.