期刊
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
卷 15, 期 1, 页码 -出版社
TAYLOR & FRANCIS LTD
DOI: 10.1088/1468-6996/15/1/014603
关键词
mid-infrared; lab-on-a-chip; resonators; waveguides; photonic crystals; chalcogenides; photodetectors; polymer enrichment layers
资金
- US Department of Energy [DE-NA000 421]
- NNSA/DNN RD
- Defense Threat Reduction Agency [HDTRA1-10-1-0101, HDTRA1-13-1-0001]
- National Science Foundation [1200406]
- EPSCoR [EPS-0814251]
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1200406] Funding Source: National Science Foundation
In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据