期刊
SCIENCE
卷 340, 期 6135, 页码 952-957出版社
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1234855
关键词
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资金
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-FG02-07ER46394]
- NSF
- Chinese Academy of Sciences [KJCX2-YW-M13]
- Defense Advanced Research Projects Agency, U.S. Air Force
Designing, fabricating, and integrating arrays of nanodevices into a functional system are the key to transferring nanoscate science into applicable nanotechnotogy. We report large-array three-dimensional (3D) circuitry integration of piezotronic transistors based on vertical zinc oxide nanowires as an active taxel-addressable pressure/force sensor matrix for tactile imaging. Using the piezoelectric polarization charges created at a metal-semiconductor interface under strain to gate/modulate the transport process of local charge carriers, we designed independently addressable two-terminal transistor arrays, which convert mechanical stimuli applied to the devices into local electronic controlling signals. The device matrix can achieve shape-adaptive high-resolution tactile imaging and self-powered, multidimensional active sensing. The 3D piezotronic transistor array may have applications in human-electronics interfacing, smart skin, and micro- and nanoelectromechanical systems.
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