期刊
SCIENCE
卷 321, 期 5896, 页码 1658-1660出版社
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1162193
关键词
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资金
- U. S. Air Force Office of Scientific Research (AFOSR)
- Defense Advanced Research Projects Agency (DARPA)
- NSF (Nanoscale Science and Engineering Center program)
- NIH Director's Pioneer Award
- National Security Science and Engineering Faculty Fellowship
- NSF for a Graduate Research Fellowship
We report a low- cost, high- throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a direct write manner. Polymer pen lithography merges the feature size control of dip- pen nanolithography with the large- area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid- shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.
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