Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam

Helium ion milling of suspended silicon nitride thin films is explored. Milled squares patterned by scanning helium ion microscope are subsequently investigated by atomic force microscopy and the relation between ion dose and milling depth is measured for both the direct (side of ion incidence) and transmission (side opposite to ion incidence) regimes. We find that direct-milling depth varies linearly with beam dose while transmission-milling depth varies with the square of the beam dose, resulting in a straightforward method of controlling local film thickness. SCANNING 34: 101-106, 2012. (c) 2012 Wiley Periodicals, Inc.