期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 80, 期 3, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3105722
关键词
argon; helium; high-frequency discharges; ionisation potential; krypton; metastable states; neon
资金
- U. S. Department of Energy, Office of Nuclear Physics [DE-AC02-06CH11357]
We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar(*)/Ar) of 2x10(-4) at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.
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