期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 80, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3184023
关键词
optical microscopes; optical scanners
资金
- Ministry of Education, Science & Technology (MoST), Republic of Korea [KIOST2] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [과C6A1808] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
In this research, chromatic confocal microscopy with transverse point beam scanning is constructed for three-dimensional surface measurement without longitudinal mechanical translation. In beam scanning chromatic confocal microscopy, the wavelength-to-depth relation and the lateral field of view should be determined considering the beam scanning angle. With the experimental results from a sample structure, the three-dimensional profile is reconstructed by relating the wavelength and scanning angle to the axial and the lateral coordinates.
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