4.5 Article

Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow

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REVIEW OF SCIENTIFIC INSTRUMENTS
卷 80, 期 12, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3266972

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Diamond nanoindentation probes may perform thousands of indentations over years of service life. There is a broad agreement that the probes need frequent cleaning, but techniques for doing so are mostly anecdotes shared between experimentalists. In preparation for the measurement of the shape of a nanoindentation probe by a scanning probe microscope, cleaning by carbon dioxide snow jets and oxygen plasma was investigated. Repeated indentation on a thumbprint-contaminated surface formed a compound that was very resistant to removal by solvents, CO(2) snow, and plasma. CO(2) snow cleaning is found to be a generally effective cleaning procedure. [doi: 10.1063/1.3266972]

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