Differences between amorphous indium oxide thin films

A series of similar to 60 nm thick indium oxide thin-films, all amorphous as determined by x-ray diffraction, were found to have physical and electrical properties that depended on the temperature of deposition. The canier mobility and film conductivity decreased with decreasing deposition temperature; the best electrical properties of high mobility and conductivity were observed at a deposition temperature just below the temperature at which crystalline films formed. The density of the film also decreased with deposition temperature from 7.2 g/cm(3) at +50 degrees C to 5.3 g/cm(3) at 100 degrees C. (C) 2013 Chinese Materials Research Society. Production and hosting by Elsevier B.V. All rights reserved.