期刊
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
卷 109, 期 45, 页码 18312-18317出版社
NATL ACAD SCIENCES
DOI: 10.1073/pnas.1216183109
关键词
scanning probe microscopy; tip modification; energy delivery; tip wear; friction
资金
- Defense Advanced Research Projects Agency/Microsystems Technology Office Award [N66001-08-1-2044]
- Asian Office of Aerospace Research and Development Award [FA2386-10-1-4065]
- Air Force Office of Scientific Research Awards [FA9550-12-1-0280, FA9550-12-1-0141]
- National Science Foundation [DMI-1152139, DMB-1124131]
- Department of Defense/Naval Postgraduate School/National Security Science and Engineering Faculty Fellowship [N00244-09-1-0012, N00244-09-1-0071]
- Chicago Biomedical Consortium
- Chicago Community Trust
- Centers of Cancer Nanotechnology Excellence initiative of the National Institutes of Health [U54 CA151880]
- Northwestern University's International Institute for Nanotechnology
Scanning probe instruments have expanded beyond their traditional role as imaging or reading tools and are now routinely used for writing. Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used. Additionally, throughput is a major concern for serial writing techniques, so for a scanning probe lithography technique to become widely applied, there needs to be a reasonable path toward a scalable architecture. Here, we use a multilayer graphene coating method to create multifunctional massively parallel probe arrays that have wear-resistant tips of uncompromised sharpness and high electrical and thermal conductivities. The optical transparency and mechanical flexibility of graphene allow this procedure to be used for coating exceptionally large, cantilever-free arrays that can pattern with electrochemical desorption and thermal, in addition to conventional, dip-pen nanolithography.
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