期刊
出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2010.06.002
关键词
Heterodyne laser interferometer; Refractive index compensation; Fabry-Perot cavity; Displacement; Wavelength tracker
类别
资金
- Dutch IOP in the Netherlands [IPT06104, IPT04001]
We describe the combined methods of displacement heterodyne laser interferometry with wavelength tracking based on a Fabry-Perot cavity to correct the instantaneous wavelength in air The optical frequency of the interferometry source was locked to the resonance peak of an open cavity directly linking the refractive index changes to frequency changes Using this method refractive index changes are compensated by an appropriate change in the laser frequency in real time eliminating the limitations with environmental parameter measurement bandwidth uncertainties associated with equation-based corrections In this paper the principles of the system are explained and experimental results showed a difference of 2 nm compared with traditional equation based techniques The measurement uncertainty and practical considerations for implementation are also discussed (C) 2010 Elsevier Inc All rights reserved
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据