Width-dependent interaction of trench-like microdischarges arranged in sub-arrays on a single silicon-based chip

Multiple trench microdischarge reactor arrays based on a silicon (Si) platform were investigated as a concept to overcome production-based errors. The devices incorporated four sub-arrays of trench-like anisotropically etched cavities on a single 2 cm x 2 cm Si chip. Each sub-array consisted of an equal number of structures of equal length, depth and separation only varying in trench width. Experiments were performed in argon (Ar) close to atmospheric pressure at ac frequencies of the order of 10 kHz. The arrays were characterized by means of electrical measurements and by (phase-resolved) optical emission. It is shown that the whole device as well as the independent sub-arrays and the individual cavities behave in a similar way as the inverted-pyramid structures investigated beforehand. Under identical conditions, the voltage required for a first ignition increases with the width of the cavities. For maximum voltages high enough for operation of all sub-arrays, the individual arrays ignite within the excitation period in reverse order. For different excitation frequencies, self-pulsing and emission waves propagating independently across the sub-arrays were observed. Both phenomena show distinct characteristics for the individual sub-arrays being more prominent for the smaller cavities. The observations are interpreted within the frame of a simple physical picture, as a field and a surface-dependent process and the influence of long-living species such as metastables.