Controlling the electron energy distribution function of electron beam generated plasmas with molecular gas concentration: II. Numerical modeling

In this work, the second in a series of two, a spatially averaged model of an electron beam generated Ar-N-2 plasma is developed to identify the processes behind the measured influence of trace amounts of N-2 on the development of the electron energy distribution function. The model is based on the numerical solution of the electron Boltzmann equation self-consistently coupled to a set of rate balance equations for electrons, argon and nitrogen species. Like the experiments, the calculations cover only the low-energy portion (<50 eV) of the electron energy distribution, and therefore a source term is added to the Boltzmann equation to represent ionization by the beam. Similarly, terms representing ambipolar diffusion along and across the magnetic field are added to allow for particle loss and electrostatic cooling from the ambipolar electric field. This work focuses on the changes introduced by adding a small admixture of nitrogen to an argon background. The model predictions for the electron energy distribution function, electron density and temperature are in good agreement with the experimentally measured data reported in part I, where it was found that the electron and ion energy distributions can be controlled by adjusting the fraction of nitrogen in the gas composition.