期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 21, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/21/2/024003
关键词
-
资金
- National Natural Science Foundation of China [11075093, 10935006]
- China Postdoctoral Science Foundation [20100480327]
Optical emission spectroscopy (OES) is classically used to determine the electron temperature in low-temperature plasmas by assuming a Maxwellian electron energy distribution function (EEDF). However, non-Maxwellian EEDFs are often found in these plasmas. In this work, we propose an OES line-ratio method that is aimed at obtaining non-Maxwellian EEDFs, with a collisional-radiative model of argon and krypton. When applied for both a capacitively coupled plasma and an inductively coupled plasma, this method provides satisfactory results compared with those measured using a Langmuir probe.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据