期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 20, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/20/2/025004
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资金
- Directorate For Engineering [0903635] Funding Source: National Science Foundation
- Div Of Chem, Bioeng, Env, & Transp Sys [0903635] Funding Source: National Science Foundation
A novel design of ICP with high coupling efficiency is presented. The efficiency augmentation is achieved using a thin window and an antenna coil enhanced by a ferromagnetic core. Considerable improvement of ICP electrical and plasma characteristics is demonstrated through experiments in ICP operated at 2 MHz in a wide range of argon gas pressures between 1 mTorr and 1 Torr, and discharge power between 15 W and 0.5 KW.
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