期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 20, 期 5, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/20/5/055006
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资金
- NSF [CBET 0714600]
- Wisconsin Alumni Research Foundation (WARF)
The assumption of thermodynamic equilibrium in low-temperature plasmas can lead to errors in determination of electron energy distribution functions (EEDFs) using optical diagnostics. Significant improvements in the accuracy of EEDFs determined using optical diagnostics on argon-containing inductively coupled plasmas (ICPs) are possible by fitting an analytic representation of the EEDF with two adjustable parameters (x and T(x)) to recorded optical emission spectra. This so-called x-form of the EEDF captures the well-known suppression of the high-energy portion of the EEDF (compared with the Maxwellian form) observed in ICPs. A review of electron kinetics summarizes the physical mechanisms that lead to this form, and explains the weak dependence of x on operating pressure. For the 1-25mTorr pressure range of argon-containing mixtures in the system examined, the fixed value x = 1.2 is found to represent the EEDF very well, followed by a near linear increase in x with pressure from x = 1.2 to 1.6 in the 25-50mTorr range. Significantly improved agreement between predictions of effective electron temperature with a global model and both probe and optical measurements when a Maxwellian EEDF is replaced by the x-form further highlights the benefit of the x-form in improved accuracy in determining the EEDF with optical diagnostics.
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