期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 19, 期 4, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/19/4/045026
关键词
-
资金
- French-German PROCOPE Project [D/0502183]
- DFG [SFB-TR 24]
The surface of a Pyrex discharge tube was treated by a capacitively coupled RF plasma at low pressure. In cases where the plasma contained oxygen, O atoms deposition on the tube surface could be confirmed via the time-dependent conversion of NO to NO2 in a post-plasma experiment. Inside the discharge tube, the evolution of the concentrations of NO and of NO2 was measured using quantum cascade laser absorption spectroscopy in the mid-infrared spectral range. The surface density of atomic oxygen was estimated to be about 2 x 10(14) cm(-2) based on NO oxidation in the closed reactor. The production rate of NO2 is in the range of 2 x 10(11) molecules cm(-3) s(-1).
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