期刊
PLASMA PROCESSES AND POLYMERS
卷 7, 期 2, 页码 92-101出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200900122
关键词
atmospheric pressure plasmas; catalysis; ion energy distributions; mass spectrometry; plasma sources
Electrical plasmas operating at atmospheric pressure are in widespread use for materials processing and in related areas such as the characterisation of surfaces. The plasma sources are of many types. improvement of their design and optimisation of their operation require high quality diagnostic data. It is very helpful, for example, to have available information on the nature and energies of the active species produced in a source and impacting on a surface. The extension of diagnostic techniques first developed for work with low pressure plasmas to a wide variety of atmospheric plasmas is discussed, together with examples of the data obtainable.
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