Influence of RF Plasma Reactor Setup on Carboxylated Hydrocarbon Coatings

Functional hydrocarbon plasma polymer coatings were investigated using a low pressure RF plasma reactor. The deposition rate was examined for different CO2/C2H4 gas ratios and different power inputs at constant pressure. The CO2/C2H4 ratio can be used to tailor the functionality and the permanence of the plasma polymer coatings which is shown by XPS. The deposition of these plasma polymer coatings was compared in a symmetrical and asymmetrical setup of the reactor and discussed regarding energy input and plasma sheath potential for the varying plasma conditions. Furthermore, the influence of Ar admixture was examined in order to identify sputtering conditions by using an asymmetric Ag electrode. While a drop in the absolute deposition rate can be seen for Ar added in symmetrical conditions, the asymmetrical setup showed no noticeable differences.