期刊
PLASMA PROCESSES AND POLYMERS
卷 5, 期 4, 页码 322-344出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200700162
关键词
biomedical; electron-energy distribution function (EEDF); ion-energy distribution function (IEDF); microdischarges; microplasmas
资金
- EPSRC [EP/D034825/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/D034825/1] Funding Source: researchfish
- National Research Foundation of Korea [R01-2007-000-10730-0, 과C6A1609] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Thanks to their portability and the non-equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non-equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high-pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.
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