期刊
PLASMA PHYSICS REPORTS
卷 37, 期 3, 页码 239-243出版社
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S1063780X1101003X
关键词
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资金
- Russian Federal Agency on Education [1931]
Results are presented from experimental studies of the current-voltage characteristics and spatial and temporal parameters of the plasma in a high-current pulsed magnetron sputtering system with a 10-cm-diameter plane disk cathode. It is shown that the plasma density in such a system is three orders of magnitude higher than that in conventional dc magnetron discharges and reaches 10(13) cm(-3) at a distance of 250 mm from the cathode at a peak discharge current of 500 A. The plasma propagates from the cathode region at a velocity of 1 cm/mu s in the axial direction and 0.25 cm/mu s in the radial direction. Optical emission spectroscopy shows that the degree of plasma ionization increases severalfold with increasing discharge current, mainly at the expense of the sputtered material.
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