Dissipation in nanoelectromechanical systems

This article is a review of the dissipation processes in nanoelectromechanical systems (NEMS). As NEMS technology becomes more and more prevalent in research and engineering applications, it is of great importance to understand the dissipative mechanisms that in part define the dynamic response of such devices. The purpose of this work is to understand, sort, and categorize dominant dissipation sources and to determine their significance with respect to physics processes and engineering considerations. (C) 2013 Elsevier B.V. All rights reserved.