期刊
PHYSICAL REVIEW LETTERS
卷 108, 期 1, 页码 -出版社
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevLett.108.016802
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资金
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC36-08GO28308]
The microscopic cause of conductivity in transparent conducting oxides like ZnO, In2O3, and SnO2 is generally considered to be a point defect mechanism in the bulk, involving intrinsic lattice defects, extrinsic dopants, or unintentional impurities like hydrogen. We confirm here that the defect theory for O-vacancies can quantitatively account for the rather moderate conductivity and off-stoichiometry observed in bulk In2O3 samples under high-temperature equilibrium conditions. However, nominally undoped thin-films of In2O3 can exhibit surprisingly high conductivities exceeding by 4-5 orders of magnitude that of bulk samples under identical conditions (temperature and O-2 partial pressure). Employing surface calculations and thickness-dependent Hall measurements, we demonstrate that surface donors rather than bulk defects dominate the conductivity of In2O3 thin films.
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