期刊
PHYSICAL REVIEW LETTERS
卷 107, 期 20, 页码 -出版社
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevLett.107.205501
关键词
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资金
- Utah Science Technology and Research (USTAR) initiative
- DARPA [N66001-10-1-4065]
- NSF
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1054899] Funding Source: National Science Foundation
By saturating a photochromic transition with a nodal illumination (wavelength, lambda), one isomeric form of a small molecule is spatially localized to a region smaller than the far-field diffraction limit. A selective oxidation step effectively locks this pattern allowing repeated patterning. Using this approach and a two-beam interferometer, we demonstrate isolated lines as narrow as lambda/8 (78 nm) and spacing between features as narrow as lambda/4 (153 nm). This is considerably smaller than the minimum far-field diffraction limit of lambda/2. Most significantly, nanopatterning is achieved via single-photon reactions and at low light levels, which in turn allow for high throughput.
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