We report on the optical properties of nitrogen acceptor-doped ZnO epilayers in the medium and high doping regimes using temperature and excitation power-dependent, as well as time-resolved photoluminescence experiments. The epilayers were doped with ammonia during homoepitaxial growth on ZnO single-crystal substrates with different surface polarities. Significant differences in the optical characteristics of the epilayers are observed between growth on nonpolar a-plane, polar c-plane Zn-face substrates and polar c-plane O-face substrates, which demonstrates different incorporation of the nitrogen acceptor depending on the substrate polarity. The incorporation of nitrogen into the ZnO films ranges between 10(19) and 10(21) cm(-3) as determined by secondary ion mass spectrometry. Within this doping range the samples change from lightly compensated to highly doped compensated. We discuss the unique photoluminescence features of nitrogen-doped ZnO epilayers within the concept of shallow donor-acceptor-pair recombinations and at the highest doping level by the appearance of potential fluctuations.
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