4.6 Article

Quantitative x-ray phase nanotomography

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PHYSICAL REVIEW B
卷 85, 期 2, 页码 -

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AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.85.020104

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X-ray ptychographic computed tomography has recently emerged as a nondestructive characterization tool for samples with representative sizes of several tens of micrometers, yet offering a resolution currently lying in but not limited to the 100-nm range. Here we evaluate the quantitativeness of this technique using a model sample with a known structure and density, and we discuss its sensitivity as a function of resolution. Additionally, we show an example application for the determination of the mass density of individual 2-mu m-sized SiO2 microspheres with a relative error of 2%. The accuracy and sensitivity demonstrated in this paper will enable quantitative imaging, segmentation, and identification of different phases in complex materials at the nanoscale.

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