4.6 Article

Observation and model of highly ordered wavy cracks due to coupling of in-plane stress and interface debonding in silica thin films

期刊

PHYSICAL REVIEW B
卷 80, 期 1, 页码 -

出版社

AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.80.014121

关键词

cracks; internal stresses; silicon compounds; thin films

资金

  1. NSF of China [10874070, 60721063]
  2. 973 project [2007CB613401]
  3. SRFDP [20070284020]

向作者/读者索取更多资源

Highly ordered wavy cracks are observed in silica films deposited on crystalline Si wafer. The wavy crack path is interpreted in terms of the coupling of the in-plane film crack and the interface debonding. A model based on the analyzing of the crack path and the stress evolution is proposed to describe the propagation of the wavy cracks. A scaling relationship between the wavelength (lambda) and amplitude (A) is found (lambda similar to A(xi)) and the scaling factor is determined to be xi=0.47 +/- 0.01.

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