期刊
PHYSICAL REVIEW B
卷 79, 期 3, 页码 -出版社
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.79.035306
关键词
ab initio calculations; band structure; conduction bands; density functional theory; electron traps; hafnium compounds; hole traps; permittivity; soft modes; titanium
资金
- EPSRC-GB [GR/S80080/01, GR/S13422/01]
- Japanese Ministry of Education, Culture, Sports, Science, and Technology [16GS0205]
- Engineering and Physical Sciences Research Council [GR/S80080/01] Funding Source: researchfish
The electronic structure and relative stability of monoclinic, tetragonal, and cubic phases of HfO2 with Ti doping in the range of 3.125%-37.5% are studied by means of first-principles calculations. The dielectric response, and electron and hole trapping properties of Ti-doped monoclinic HfO2 are calculated using a hybrid density-functional B3LYP. The incorporation of Ti into HfO2 induces higher polarizability of Hf and O ions, accompanied by an increase in the static dielectric constant and softening of phonon modes. However, the Ti ions serve as deep electron traps inducing localized levels in the gap and, at high Ti concentrations, the HfO2 conduction-band offset with Si is effectively reduced by about 1.5 eV.
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