期刊
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
卷 5, 期 1, 页码 22-24出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssr.201004378
关键词
solar cells; surface passivation; Si; silicon oxide; aluminium oxide; atomic layer deposition
资金
- German Ministry for the Environment, Nature Conservation and Nuclear Safety (BMU) [0325150]
It is demonstrated that the application of an ultrathin aluminum oxide (Al2O3) capping film can improve the level of silicon surface passivation obtained by low-temperature synthesized SiO2 profoundly. For such stacks, a very high level of surface passivation was achieved after annealing, with S-eff < 2 cm/s for 3.5 Omega cm n-type c-Si. This can be attributed primarily to a low interface defect density (D-it < 10(11) eV(-1) cm(-2)). Consequently, the Al2O3 capping layer induced a high level of chemical passivation at the Si/SiO2 interface. Moreover, the stacks showed an exceptional stability during high-temperature firing processes and therefore provide a low temperature (<= 400 degrees C) alternative to thermally-grown SiO2. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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