期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 210, 期 8, 页码 1575-1583出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201228631
关键词
diamond; nanocrystalline materials; sputtering; surface acoustic waves; thin films; ZnO
资金
- Scottish Sensing Systems Centre (S3C)
- Royal Society [RG090609]
- Carnegie Trust
- Royal Society of Edinburgh
- Royal Academy of Engineering-Research Exchanges with China and India Awards
- Fundamental Research Funds for the Central Universities [ZYGX2009J046, ZYGX2009x007]
- Sichuan Young Scientists Foundation [2010JQ0006]
- EPSRC [EP/F063865/1, EP/F06294X/1]
- Engineering and Physical Sciences Research Council [EP/F063865/1, EP/F06294X/1] Funding Source: researchfish
- EPSRC [EP/F063865/1, EP/F06294X/1] Funding Source: UKRI
Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanocrystalline diamond (UNCD) layers on silicon using high target utilization sputtering technology. The unique characteristic of this sputtering technique allows room temperature growth of smooth ZnO films with a low roughness and low stress at high growth rates. Surface acoustic wave (SAW) devices were fabricated on ZnO/UNCD structure and exhibited good transmission signals with a low insertion loss and a strong side-lobe suppression for the Rayleigh mode SAW. Based on the optimization of the layered structure of the SAW device, a good performance with a coupling coefficient of 5.2% has been realized, promising for improving the microfluidic efficiency in droplet transportation comparing with that of the ZnO/Si SAW device. An optimized temperature coefficient of frequency of -23.4ppm degrees C-1 was obtained for the SAW devices with the 2.72 mu m-thick ZnO and 1.1 mu m-thick UNCD film. Significant thermal effect due to the acoustic heating has been redcued which is related to the temperature stability of the ZnO/UNCD SAW device.
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