An investigation of Fe-doped ZnO thin films grown by magnetron sputtering

We report on the structural, chemical and optoelectronic properties of Fe-doped ZnO films deposited by dc magnetron sputtering. The effects of sputtering and post-growth thermal annealing conditions on structural and optical properties of ZnO films with different Fe contents were investigated by x-ray diffraction, XPS and photoluminescence techniques. The results are discussed taking into consideration the chemical state of the incorporated iron and altered balance of the intrinsic defect concentration.