期刊
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES
卷 43, 期 1, 页码 366-371出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.physe.2010.08.013
关键词
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资金
- Natural Science Foundation of China [10874115]
- National Major Basic Research Project [2010CB933702]
- Shanghai Nanotechnology Research Project [0952nm01900]
- Shanghai Key Basic Research Project [08JC1411000]
- Research fund for the Doctoral Program of Higher Education of Chain
Controllable humidity sensitive nanoporous anodic aluminum oxide (MO) films were prepared by the stable high field anodization in the oxalic acid electrolyte. The sensitivity of this AAO-based sensor can be enhanced at the low humidity region by pore widening and annealing. Exposing more anions to pore wall surface by pore widening assists the surface electron tunneling effect. The hydrolyzation of carbon dioxide generated by decompositing oxalic anions in MO during annealing facilitates the protonic conduction. These could be responsible for the improvement of sensitivity. Different hysteresis types of AAO sensors prepared by the high field anodization were explained by the capillary condensation and lateral moisture diffusion. This study provides a new approach to fabricate high performance metal oxide humidity sensors by incorporating stable and accessible proton sources into humidity sensing materials. (C) 2010 Elsevier B.V. All rights reserved.
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